LC Clients

• Abatement System
• Rating: 208 Vac, 3 Phase, 50/60Hz, 23.5A
• Model: Orion (see nomenclature for specific part number)
• Model Nomenclature: H10 followed by 1 / 2 / 3 / 4 / 5 / 6 / 7 / 8 / 9
  

  #1 – Core Type	Description
  A	Gen 1

  #2 – Burner (Combustor) Type	Description
  1	3″ Inward Fired
  2	6″ Inward Fired

  #3 – Head Type	Description
  A	CVDQ
  B	CVDQ w/ 19mm nozzles
  C	Swept MK2 etch
  D	Swept MK2 thin films

  #4 – Bypass Valves	Description
  1	1 BV, Local
  2	2 BV, Local
  3	3 BV, Local
  4	4 BV, Local
  5	5 BV, Local
  6	6 BV, Local
  A	1 RBV
  B	2 RBV
  C	3 RBV
  D	4 RBV
  E	5 RBV
  F	6 RBV

  #5 – Customer Interface	Description
  1	Dry contacts (Terminal)
  2	SECS / GEM
  3	Integrated System

  #6 – Thermal Handling	Description
  A	60 kW
  B	100 kW
  C	160 kW
  D	200 kW

  #7 – Particulate Removal	Description
  1	Single Atomizer – 70%
  2	Dual Atomizer – 90%

  #8 – Thermal Management	Description
  A	Smart TMS Mk2 Controller Ready
  B	Smart TMS Mk2 Controller + Heaters

  #9 – Accessories	Description
  0	None
  1	Soft Shutdown

   

• UL 61010-1: Ed 3

• N/A

General Note:

• Project no.: LV-16181
• LC Listing Report no.: 10.02.16181-1_Rev.0
• LC Certificate no.: LC16181-1